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Micrometer Level 3D Inspector

By: Integro Technologies

Using a 2.2 micrometer-sensitive 3D laser mounted to a 3-axis robot, several high-definition images are acquired and combined to generate a 3D point cloud.

This 1GB image is generated using key corner points to overlay 3D data from scan-to-scan. Inspection consists evaluating 20,000 individual pin locations across each of 8 pin grid groups.

Each pin is less than 100 square micrometers in size, and only 360 micrometers tall. In addition to planarity, the inspection checks for x-y location, rotation, and pin deviation to within 10 micrometers.

This entire process occurs in 90 seconds.

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