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Extreme Ultraviolet (EUV) Flat Mirrors

By: Edmund Optics

These precision polished, multi-layer mirrors are designed for maximum achievable reflectance at the design wavelength and Angle of Incidence (AOI). They are designed for EUV beam steering and harmonic separation applications.

Maximum achievable reflection at 13.5nm
Extreme Ultraviolet (EUV) Flat Mirrors are available in 5° and 45° AOI versions and feature nearly ideal reflectivity at 13.5nm, the wavelength of highest reflectivity available in the EUV spectrum. The RoHS compliant mirrors offer a coating deposited on a super-polished single crystal silicon substrate for superior thermal stability. Exhibiting a surface roughness less than 3A RMS, these EUV mirrors greatly reduce scatter of incident light. The multi-layer, metal/semi-conductor coating includes a Mo/Si multilayer with a Si top layer. With a surface flatness of ?/10 at 632.8nm and 6.35mm thickness, the 45° AOI mirrors are ideal for steering s-polarized beams, while the 5° AOI mirrors are excellent for use with unpolarized beams.

Ideal for CDI and materials science research
Extreme Ultraviolet (EUV) Flat Mirrors are used for emerging applications such as Coherent Diffractive Imaging (CDI) and materials science research. CDI is a non-contact imaging technique, capable of achieving resolutions approaching 10nm and is commonly used to analyze extremely small nanofabricated structures. The mirrors are also used as harmonic selectors for High Harmonic Generation (HHG) beams. Extreme Ultraviolet (EUV) Flat Mirrors are in-stock and available for immediate delivery.

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